international journal of scientific engineering research volume 3 issue 11 november 2012 1 issn 2229 5518 micro electromechanical system mems sensor azharuddin allamin shaikh is currently pursuing degree program in ...
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...International journal of scientific engineering research volume issue november issn micro electromechanical system mems sensor azharuddin allamin shaikh is currently pursuing degree program in electronics and telecommunication shivaji university india e mail shaikhazar gmail com dattatraya shashikant shitole datta abstract there are many new emerging technologies but this paper focuses particularly about purpose to describe the development technology consider its current use sensing identify discuss future technological trends directions today s life design methodology approach we poised a revolution microelectronics which has dramatically reduced cost increased capability because very small devices given much potential prosper area mechanics encompassing electro mechanical systems promises revolutionize nearly every product category by bringing together silicon based with machining making possible realization complete on chip commercial applications inertial sensors power rf switches ...