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picture1_Structure Ppt 77422 | 8 Mmpart2(mpw Process Description I)


picture2_Structure Ppt 77422 | 8 Mmpart2(mpw Process Description I) picture3_Structure Ppt 77422 | 8 Mmpart2(mpw Process Description I)

 83x       Filetype PPT       File size 2.46 MB       Source: tid.uio.no


File: Structure Ppt 77422 | 8 Mmpart2(mpw Process Description I)
Contents Process Description, Part I Cross section overview Key process features MPW process step-by-step Process Description, Part II Process Description, Part II Absolute limitations Absolute limitations Process monitors Process monitors ...

icon picture PPT Filetype Power Point PPT | Posted on 03 Sep 2022 | 2 years ago
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...Contents process description part i cross section overview key features mpw step by ii absolute limitations monitors test data slide silicon micromachining micromechanics in is here defined as three dimensional single crystal means of photolithographic etching techniques this definition covers most used to make micromechanical sensors although some cases additive structures such polysilicon and dioxide also have been micromachined selective mechanical drilling or other machining methods are structure isotropic anisotropic etc it a face centred cubic diamond with two atoms associated each lattice point the unit cube one atom located position xyz coordinates being basic cell length best use hardware model see dimensions...
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