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...Pp pm page cavitation in ultrasonic cleaning and cell disruption it is important to quantify the energy all applications ranging from cleaners disruptors a meter measures intensity frequency within megasonic including probes with side mounted sensors that can be placed jet streams single wafer as well those resembling beaker emanating horns used for homogenizing lawrence azar are fundamentals of varied clean substrate surfaces term represents sonic waves hav typical assembly system includes ing wave above approximately tank holds fluid medium such an aque khz both traditional ous solution which generally additives spectrum extends surfactants detergents enhance performance lately more recently distinctive means delivery have been uti about mhz lized particularly device disrup one example megasonics diverted into stream tion has traditionally horn impacts surface this works at fixed normally another imparts directly on film between designed no than few millimeters thick resonant longitu...