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...Mit opencourseware http ocw edu j esd control of manufacturing processes sma spring for information about citing these materials or our terms use visit subject lecture yield modeling march references g may and c spanos fundamentals semiconductor process chapter wiley d ciplickas x li a strojwas predictive vlsic s international workshop on statistical metrology june h stapper r rosner integrated circuit management analysis development implementation ieee trans semicond manuf vol no types related problems parametric failures deviations in e line width result functional quality loss performance degradation random uncorrelated failure some element example individual via area dependent to the opportunity killer defect particles...